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| 1 | +# Lookup Table Generation |
| 2 | + |
| 3 | +Generate dopant profile lookup tables for PiezoD using FLOOXS TCAD process simulation. |
| 4 | + |
| 5 | +## Prerequisites |
| 6 | + |
| 7 | +- Docker (with Compose) |
| 8 | +- FLOOXS source code (free for academic/research use, requires registration) |
| 9 | + |
| 10 | +Request access: http://www.flooxs.ece.ufl.edu/index.php/Download |
| 11 | + |
| 12 | +## Setup |
| 13 | + |
| 14 | +1. Download FLOOXS source code after registration |
| 15 | +2. Extract to `FLOOXS_2026/` in this folder (gitignored, not committed) |
| 16 | +3. Build the Docker image (one time): |
| 17 | + |
| 18 | +```bash |
| 19 | +docker compose build |
| 20 | +``` |
| 21 | + |
| 22 | +## Usage |
| 23 | + |
| 24 | +Run a simulation: |
| 25 | + |
| 26 | +```bash |
| 27 | +docker compose run --rm flooxs input.tcl |
| 28 | +``` |
| 29 | + |
| 30 | +Input/output files go in `simulations/` which is mounted into the container. |
| 31 | + |
| 32 | +Interactive shell (for debugging): |
| 33 | + |
| 34 | +```bash |
| 35 | +docker compose run --rm flooxs /bin/bash |
| 36 | +``` |
| 37 | + |
| 38 | +## Workflow |
| 39 | + |
| 40 | +1. Generate inputs - Python script creates FLOOXS input files in `simulations/` |
| 41 | +2. Run simulations - `docker compose run` executes FLOOXS on each input |
| 42 | +3. Post-process - Python/MATLAB extracts profiles and builds lookup table |
| 43 | + |
| 44 | +## Parameter Space |
| 45 | + |
| 46 | +| Parameter | Values | |
| 47 | +|-----------|--------| |
| 48 | +| Dopants | Boron, Phosphorus, Arsenic | |
| 49 | +| Doses | 2e14, 2e15, 2e16 cm^-2 | |
| 50 | +| Energies | 20, 50, 80 keV | |
| 51 | +| Anneal times | 15, 30, 45, 60, 75, 90, 105, 120 min | |
| 52 | +| Anneal temps | 900, 1000, 1100 C | |
| 53 | +| Oxidation | With/without passivation oxide | |
| 54 | + |
| 55 | +Total: 3 x 3 x 3 x 8 x 3 x 2 = 1296 simulations |
| 56 | + |
| 57 | +## Files |
| 58 | + |
| 59 | +| File | Description | |
| 60 | +|------|-------------| |
| 61 | +| `docker-compose.yml` | Container service definition | |
| 62 | +| `Dockerfile` | FLOOXS build instructions | |
| 63 | +| `simulations/` | Input/output directory (mounted in container) | |
| 64 | +| `postProcessTables.m` | MATLAB post-processor (legacy) | |
| 65 | +| `simulation.template` | TSUPREM-4 template (legacy, needs conversion) | |
| 66 | +| `simulationControl.py` | Python 2 runner (legacy, needs rewrite) | |
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