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process-window

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Flowbudget / euvsimulator

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Open-source EUV lithography simulator in Python/PyTorch: Mo/Si mirror, thin-mask and RCWA mask diffraction, partially coherent imaging, chemically amplified resist (Dill, PEB, development) with stochastic LER/LWR, process window and calibration. Every physical default has a named source. Browser GUI and REST API. Apache-2.0.

python pytorch calibration optics physics-simulation lithography semiconductor stochastic-simulation rcwa fastapi photolithography euv computational-lithography resist-modeling process-window euv-lithography hopkins-imaging dill-model multilayer-optics line-edge-roughness
  • Updated Sep 12, 2026
  • Jupyter Notebook

Akbar-0 / computational-lithography

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The project implements state-of-the-art computational lithography algorithms used in semiconductor manufacturing, complete with educational documentation and working examples!

inverse-imaging-problems inverse-lithography-technology optical-proximity-correction hopkins-imaging-model process-window depth-of-focus exposure-latitude normalized-image-log-slope resolution-enhancement-techniques bossung-curve
  • Updated Feb 5, 2026
  • Python

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